@article{hamouda:cea-03695427, TITLE = {{Interface chemistry of pristine TiN/La: Hf 0.5 Zr 0.5 O 2 capacitors}}, AUTHOR = {Hamouda, W. and Lubin, C. and Ueda, S. and Yamashita, Y. and Renault, O. and Mehmood, F. and Mikolajick, T. and Schroeder, U. and Negrea, R. and Barrett, N.}, URL = {https://cea.hal.science/cea-03695427}, JOURNAL = {{Applied Physics Letters}}, PUBLISHER = {{American Institute of Physics}}, VOLUME = {116}, NUMBER = {25}, PAGES = {252903}, YEAR = {2020}, MONTH = Jun, DOI = {10.1063/5.0012595}, HAL_ID = {cea-03695427}, HAL_VERSION = {v1}, }