%0 Conference Paper %F Oral %T Innovative Multilayer OTS Selectors for Performance Tuning and Improved Reliability %+ CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information %+ Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI) %+ Institut des Nanotechnologies de Lyon (INL) %A Laguna, C. %A Castellani, N. %A Bernard, M. %A Rochat, N. %A Rouchon, D. %A Sabbione, C. %A Garrione, J. %A Nolot, E. %A Bourgeois, G. %A Cyrille, M.-C. %A Militaru, L. %A Souifi, A. %A Navarro, Gabriele %A Nowak, E. %< avec comité de lecture %B IMW 2020 - 2020 IEEE International Memory Workshop %C Dresde, Germany %I IEEE %P 1-4 %8 2020-05-17 %D 2020 %R 10.1109/IMW48823.2020.9108130 %Z Engineering Sciences [physics]Conference papers %X In this paper, we investigate an innovative Ovonic Threshold Switching Selector (OTS) based on Multilayer structure (ML). Thanks to physico-chemical analysis and electrical characterization we show how MLs properties and structure can be tuned thanks to the engineering of each individual layer stoichiometry, thickness and interfaces. Ge/N-doped SbSe-based MLs OTS are analyzed by FTIR and Raman spectroscopy revealing the structural features present in the as-deposited materials and the strong interaction among individual layers at interfaces. We demonstrate the improved variability control of electrical parameters wrt standard OTS achieved by co-sputtering technique, and the high endurance capability of MLs OTS up to more than 2·10$^9$ cycles with stable nA leakage current. Moreover, we show how Ge-N bonds play a huge role on OTS thermal stability at 400° C and how they can be tuned more easily in ML OTS. These developments pave the way towards a new class of OTS materials and their engineering, ensuring high temperature stability and best tuning of electrical performances. %G English %2 https://cea.hal.science/cea-02930899/document %2 https://cea.hal.science/cea-02930899/file/CL-IMW2020-SUBMITTED.pdf %L cea-02930899 %U https://cea.hal.science/cea-02930899 %~ CEA %~ CNRS %~ UNIV-LYON1 %~ INSA-LYON %~ EC-LYON %~ INL %~ OPENAIRE %~ DSV %~ DRT %~ CEA-DRF %~ LETI %~ INSA-GROUPE %~ CEA-GRE %~ UDL %~ UNIV-LYON