@article{zaid:cea-02884587, TITLE = {{Influence of ultra-low ethylene partial pressure on microstructural and compositional evolution of sputter-deposited Zr-C thin films}}, AUTHOR = {Zaid, Hicham and Aleman, Angel and Tanaka, Koichi and Li, Chao and Berger, Pascal and Back, Tyson and Fankhauser, Joshua and Goorsky, Mark S. and Kodambaka, Suneel}, URL = {https://cea.hal.science/cea-02884587}, JOURNAL = {{Surface and Coatings Technology}}, PUBLISHER = {{Elsevier}}, VOLUME = {398}, PAGES = {126053}, YEAR = {2020}, MONTH = Sep, DOI = {10.1016/j.surfcoat.2020.126053}, PDF = {https://cea.hal.science/cea-02884587/file/SURFCOAT_D_2020_Berger_V0.pdf}, HAL_ID = {cea-02884587}, HAL_VERSION = {v1}, }