@article{michel:cea-02570721, TITLE = {{Phosphorus emitter engineering by plasma-immersion ion implantation for c-Si solar cells}}, AUTHOR = {Michel, Thomas and Le Perchec, Jerome and Lanterne, Adeline and Monna, R{\'e}mi and Torregrosa, Frank and Roux, Laurent and Commandre, Mireille}, URL = {https://cea.hal.science/cea-02570721}, JOURNAL = {{Solar Energy Materials and Solar Cells}}, PUBLISHER = {{Elsevier}}, VOLUME = {133}, PAGES = {194-200}, YEAR = {2015}, MONTH = Feb, DOI = {10.1016/j.solmat.2014.11.014}, KEYWORDS = {Ion implantation ; Plasma-immersion ; Crystalline silicon ; Solar cell ; Photovoltaics}, PDF = {https://cea.hal.science/cea-02570721/file/Michel-2015-SolMat-%20Phosphorus%20emitter%20engineering%20by%20PIII%20for%20c-Si%20solar%20cells.pdf}, HAL_ID = {cea-02570721}, HAL_VERSION = {v1}, }