@article{masarotto:cea-02202452, TITLE = {{Transmission measurements of multilayer interference filters developed for a full integration on Complementary Metal Oxide Semiconductor chips}}, AUTHOR = {Masarotto, L. and Frey, L. and Charles, M. L. and Roule, A. and Rodriguez, G. and Souil, R. and Morales, C. and Larrey, V.}, URL = {https://cea.hal.science/cea-02202452}, JOURNAL = {{Thin Solid Films}}, PUBLISHER = {{Elsevier}}, VOLUME = {631}, PAGES = {23-28}, YEAR = {2017}, DOI = {10.1016/j.tsf.2017.03.055}, KEYWORDS = {Wavelength filtering devices ; Optical properties ; Materials characterization ; Process characterization ; Thin films}, HAL_ID = {cea-02202452}, HAL_VERSION = {v1}, }