@article{servin:cea-02202410, TITLE = {{Progress and process improvements for multiple electron-beam direct write}}, AUTHOR = {Servin, Isabelle and Pourteau, Marie-Line and Pradelles, Jonathan and Essomba, Philippe and Lattard, Ludovic and Brandt, Pieter and Wieland, Marco}, URL = {https://cea.hal.science/cea-02202410}, JOURNAL = {{Japanese Journal of Applied Physics}}, PUBLISHER = {{Japan Society of Applied Physics}}, VOLUME = {56}, NUMBER = {6}, PAGES = {-}, YEAR = {2017}, DOI = {10.7567/JJAP.56.06GC03}, HAL_ID = {cea-02202410}, HAL_VERSION = {v1}, }