%0 Journal Article %T Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared Imaging %+ Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI) %A Duraffourg, Laurent %A Laurent, Laurent %A Moulet, Jean-Sébastien %A Arcamone, Julien %A Yon, Jean-Jacques %Z This research was funded by the LETI Carnot Institute's MOTION project. %< avec comité de lecture %@ 2072-666X %J Micromachines %I MDPI %V 9 %N 8 %P 401 %8 2018-08 %D 2018 %R 10.3390/mi9080401 %K nano resonator %K nano-system array %K uncooled IR-bolometer %Z Engineering Sciences [physics]Journal articles %X Microbolometers arethe most common uncooled infrared techniques that allow 50 mK-temperature resolution to be achieved on-scene. However, this approach struggles with both self-heating, which is inherent to the resistive readout principle, and 1/f noise. We present an alternative approach that consists of using micro/nanoresonators vibrating according to a torsional mode, and whose resonant frequency changes with the incident IR-radiation. Dense arrays of such electromechanical structures were fabricated with a 12 mu m pitch at low temperature, allowing their integration on complementary metal-oxide-semiconductor (CMOS) circuits according to a post-processing method. H-shape pixels with 9 mu m-long nanorods and a cross-section of 250 nm x 30 nm were fabricated to provide large thermal responses, whose experimental measurements reached up to 1024 Hz/nW. These electromechanical resonators featured a noise equivalent power of 140 pW for a response time of less than 1 ms. To our knowledge, these performances are unrivaled with such small dimensions. We also showed that a temperature sensitivity of 20 mK within a 100 ms integration time is conceivable at a 12 mu m pitch by co-integrating the resonators with their readout electronics, and suggesting a new readout scheme. This sensitivity could be reached short-term by depositing on top of the nanorods a vanadium oxide layer that had a phase-transition that could possibly enhance the thermal response by one order of magnitude. %G English %L cea-02184472 %U https://cea.hal.science/cea-02184472 %~ CEA %~ DRT %~ LETI %~ CEA-GRE