@inproceedings{gharbi:cea-02087039, TITLE = {{Pillars fabrication by DSA lithography: material and process options}}, AUTHOR = {Gharbi, Ahmed and Pimenta-Barros, Patricia and Saouaf, Olivia and Reynaud, Gabriel and Pain, Laurent and Tiron, Raluca and Navarro, Christophe and Nicolet, C{\'e}lia and Cayrefourcq, Ian and Perego, Michele and Perez-Murano, Francesc and Amat, Esteve and Fernandez-Regulez, Marta}, URL = {https://cea.hal.science/cea-02087039}, BOOKTITLE = {{Advances in Patterning Materials and Processes XXXV}}, ADDRESS = {San Jose, United States}, PUBLISHER = {{SPIE}}, SERIES = {Proceedings of the SPIE. Advances in Patterning Materials and Processes XXXV (2018)}, VOLUME = {10586}, PAGES = {105860Q}, YEAR = {2018}, MONTH = Feb, DOI = {10.1117/12.2297414}, KEYWORDS = {block copolymer ; self-assembly ; lithography ; pillars}, PDF = {https://cea.hal.science/cea-02087039/file/105860Q%20_arch.pdf}, HAL_ID = {cea-02087039}, HAL_VERSION = {v1}, }