%0 Conference Paper %F Oral %T Atomic Layer Deposition of Alumina on Silicon Nanotrees, towards the development of 3D ultrastable Aqueous Si Microsupercapacitor %+ Synthèse, Structure et Propriétés de Matériaux Fonctionnels (STEP) %+ Silicon Nanoelectronics Photonics and Structures (SiNaps) %+ Laboratoire d'Electronique Moléculaire Organique et Hybride (LEMOH) %+ Université Grenoble Alpes [2016-2019] (UGA [2016-2019]) %A Valero, Anthony %A Gaboriau, Dorian %A Gentile, P. %A Sadki, Saïd %< avec comité de lecture %B 233rd ECS MEETING %C Seattle, WA, United States %8 2018-05-13 %D 2018 %K Microsupercapacitors %K Silicon nanotrees %K High-k dielectrics %K aqueous electrolytes %K PEDOT-PSS %Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] %Z Engineering Sciences [physics]/Electric power %Z Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics %Z Engineering Sciences [physics]/MaterialsConference papers %G English %2 https://cea.hal.science/cea-01993877/document %2 https://cea.hal.science/cea-01993877/file/AbstractECS.pdf %L cea-01993877 %U https://cea.hal.science/cea-01993877 %~ CEA %~ UGA %~ CNRS %~ INAC-SP2M %~ DSM-INAC %~ INC-CNRS %~ CEA-DRF %~ IRIG %~ CEA-GRE %~ TEST-HALCNRS %~ UGA-COMUE %~ SYMMES %~ TEST2-HALCNRS