%0 Journal Article %T Correlation of electrical characteristics with interface chemistry and structure in Pt/Ru/PbZr$_{0.52}$ Ti$_{0.48}$O$_3$/Pt capacitors after post metallization annealing %+ Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI) %+ Luxembourg Institute of Science and Technology (LIST) %+ Laboratoire d'Etude des NanoStructures et Imagerie de Surface (LENSIS) %A Gueye, Ibrahima %A Le Rhun, Gwenael %A Renault, Olivier %A Cooper, David %A Defay, Emmanuel %A Barrett, Nicholas %< avec comité de lecture %@ 0003-6951 %J Applied Physics Letters %I American Institute of Physics %V 113 %P 132901 %8 2018-09-24 %D 2018 %R 10.1063/1.5041767 %Z Physics [physics]Journal articles %X We report the effect of post-metallization annealing (PMA) on the electrical behavior of Pt/Ru/PbZr$_{0.52}$ Ti$_{0.48}$O$_3$(PZT)/Pt capacitors and correlations with the physical chemistry of the top electrode/PZTinterface. PMA improves the electrical characteristics, in particular the breakdown fieldwhile inducing important chemical and structural modifications at the interface. The Ru electrodelayer is oxidized and disrupted. There is evidence for the formation of RuO$_x$ and ZrRuO$_x$ metallicphases at the interface but no Pb transport into the electrode region is observed. %G English %L cea-01935332 %U https://cea.hal.science/cea-01935332 %~ CEA %~ CNRS %~ DRT %~ IRAMIS-SPEC %~ CEA-UPSAY %~ UNIV-PARIS-SACLAY %~ CEA-UPSAY-SACLAY %~ LETI %~ CEA-GRE %~ TEST-HALCNRS %~ GS-ENGINEERING %~ IRAMIS %~ GS-PHYSIQUE %~ INSTITUT-SCIENCES-LUMIERE