@article{pessoa:cea-01917750, TITLE = {{Grazing incident X-ray fluorescence combined with X-ray reflectometry metrology protocol of telluride-based films using in-lab and synchrotron instruments}}, AUTHOR = {Pessoa, W. and Roule, A. and Nolot, E. and Mazel, Y. and Bernard, M. M. and L{\'e}py, M.-C. and M{\'e}nesguen, Y. and Novikova, A. and Gergaud, P. and Brigidi, F. and Eichert, D.}, URL = {https://cea.hal.science/cea-01917750}, JOURNAL = {{Spectrochimica Acta Part B: Atomic Spectroscopy}}, PUBLISHER = {{Elsevier}}, VOLUME = {149}, PAGES = {143 - 149}, YEAR = {2018}, MONTH = Nov, DOI = {10.1016/j.sab.2018.07.003}, KEYWORDS = {GIXRF ; XRR ; XPS ; Mass spectrometry ; Tellurium ; Thin films}, HAL_ID = {cea-01917750}, HAL_VERSION = {v1}, }