%0 Conference Proceedings %T Detecting volatile organic compounds using a resonant microcantilever-based system %+ Electronique, Systèmes de communication et Microsystèmes (ESYCOM) %+ Laboratoire Capteurs Diamant (LCD-LIST) %A Abreu, Maira Possas %A Ghassemi, Farbod %A Rousseau, Lionel %A Lissorgues, Gaelle, Bazin %A Habchi, Massiel %A Scorsone, Emmanuel %< avec comité de lecture %( IEEE Xplore %B 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) %C Budapest, Hungary %I IEEE %P 7514883 %8 2016-05-30 %D 2016 %R 10.1109/DTIP.2016.7514883 %K Polymer %K volatile organic compound (VOC) %K Surface treatment %K Fabrication %K Sensor arrays %K cantilevers %K chemical sensors %K diamond %K microsensors %K organic compounds %K volatile organic compounds %K silicon cantilever %K diamond cantilever %K polymer coatings %K VOC detection %K resonant microcantilever-based system %K polymer films %K silicon %K Microcantilever %K Sensor %Z Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] %Z Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics %Z Chemical Sciences/Analytical chemistry %Z Engineering Sciences [physics]/Electromagnetism %Z Engineering Sciences [physics]/Materials %Z Life Sciences [q-bio]/Bioengineering/BiomaterialsConference papers %X This paper presents a system based on an array of eight micro-cantilevers for volatile organic compounds (VOC) detection. Sensors based on a micromechanical array of silicon and diamond cantilevers are sensitized for the detection of analytes using polymer coatings. Connections to the sensors are not permanent and they can be easily changed for another application or for maintenance. Detections of VOCs are demonstrated. %G English %L cea-01913396 %U https://cea.hal.science/cea-01913396 %~ CEA %~ CNAM %~ OPENAIRE %~ ESYCOM %~ DRT %~ CEA-UPSAY %~ UNIV-PARIS-SACLAY %~ CEA-UPSAY-SACLAY %~ LIST %~ ESIEE-PARIS %~ DM2I %~ GS-ENGINEERING %~ GS-COMPUTER-SCIENCE %~ UNIV-EIFFEL %~ UPEM-UNIVEIFFEL %~ ESIEE-UNIVEIFFEL %~ TEST3-HALCNRS %~ HESAM-CNAM %~ HESAM %~ DIN