@inproceedings{abreu:cea-01913396, TITLE = {{Detecting volatile organic compounds using a resonant microcantilever-based system}}, AUTHOR = {Abreu, Maira Possas and Ghassemi, Farbod and Rousseau, Lionel and Lissorgues, Gaelle Bazin and Habchi, Massiel and Scorsone, Emmanuel}, URL = {https://cea.hal.science/cea-01913396}, BOOKTITLE = {{2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)}}, ADDRESS = {Budapest, Hungary}, PUBLISHER = {{IEEE}}, PAGES = {7514883}, YEAR = {2016}, MONTH = May, DOI = {10.1109/DTIP.2016.7514883}, KEYWORDS = {Polymer ; volatile organic compound (VOC) ; Surface treatment ; Fabrication ; Sensor arrays ; cantilevers ; chemical sensors ; diamond ; microsensors ; organic compounds ; volatile organic compounds ; silicon cantilever ; diamond cantilever ; polymer coatings ; VOC detection ; resonant microcantilever-based system ; polymer films ; silicon ; Microcantilever ; Sensor}, HAL_ID = {cea-01913396}, HAL_VERSION = {v1}, }