@article{michalas:cea-01841455, TITLE = {{Electrical assessment of diamond MIM capacitors and modeling of MEMS capacitive switch discharging}}, AUTHOR = {Michalas, M and Koutsoureli, M. and Saada, Samuel and Mer-Calfati, Christine and Leuliet, A. and Martins, P. and Bansropun, S. and Papaioannou, P and Bergonzo, P. and Ziaei, A.}, URL = {https://cea.hal.science/cea-01841455}, JOURNAL = {{Journal of Micromechanics and Microengineering}}, PUBLISHER = {{IOP Publishing}}, VOLUME = {24}, NUMBER = {11}, YEAR = {2014}, MONTH = Nov, DOI = {10.1088/0960-1317/24/11/115017}, KEYWORDS = {Diamond ; Dielectric Charging ; RF MEMS ; Reliability ; Nanostructure}, PDF = {https://cea.hal.science/cea-01841455/file/article_LMichalas_Nanocom.pdf}, HAL_ID = {cea-01841455}, HAL_VERSION = {v1}, }