%0 Journal Article %T Flexible organic–inorganic hybrid layer encapsulation for organic opto-electronic devices %+ Laboratoire de physique des interfaces et des couches minces [Palaiseau] (LPICM) %+ Centro de Física da Universidade do Minho (CFUM) %+ Laboratoire Innovation en Chimie des Surfaces et NanoSciences (LICSEN UMR 3685) %+ International Iberian Nanotechnology Laboratory (INL) %A Majee, Subimal %A Cerqueira, Maria Fátima %A Tondelier, Denis %A Geffroy, Bernard %A Bonnassieux, Yvan %A Alpuim, Pedro %A Bouree, Jean Eric %< avec comité de lecture %@ 0300-9440 %J Progress in Organic Coatings %I Elsevier %V 80 %P 27 - 32 %8 2014-12-08 %D 2014 %R 10.1016/j.porgcoat.2014.11.015 %Z Chemical Sciences/Material chemistryJournal articles %X In this work we produce and study the flexible organic–inorganic hybrid moisture barrier layers for the protection of air sensitive organic opto-electronic devices. The inorganic amorphous silicon nitride layer (SiN$_x$:H) and the organic PMMA [poly (methyl methacrylate)] layer are deposited alternatingly by using hot wire chemical vapor deposition (HW-CVD) and spin-coating techniques, respectively. The effect of organic–inorganic hybrid interfaces is analyzed for increasing number of interfaces. We produce highly transparent (∼80% in the visible region) hybrid structures. The morphological properties are analyzed providing a good basis for understanding the variation of the water vapor transmission rate (WVTR) values. A minimum WVTR of 4.5×10$^{−5}$ g/m$^2$ day is reported at the ambient atmospheric conditions for 7 organic/inorganic interfaces. The hybrid barriers show superb mechanical flexibility which confirms their high potential for flexible applications. %G English %L cea-01758732 %U https://cea.hal.science/cea-01758732 %~ CEA %~ X %~ CNRS %~ X-PICM %~ X-DEP %~ X-DEP-PHYS %~ LPICM %~ PUBNIMBE %~ INC-CNRS %~ IRAMIS-NIMBE %~ IRAMIS %~ GS-PHYSIQUE