%0 Journal Article %T Production of pulsed, mass-selected beams of metal and semiconductor clusters %+ Centre de recherche sur les Ions, les MAtériaux et la Photonique (CIMAP - UMR 6252) %A Kamalou, Omar %A Rangama, Jimmy %A Ramillon, Jean-Marc %A Guinement, Patrick %A Huber, Bernd A. %< avec comité de lecture %@ 0034-6748 %J Review of Scientific Instruments %I American Institute of Physics %V 79 %P 063301 %8 2008 %D 2008 %Z Physics [physics]/Physics [physics]/Atomic Physics [physics.atom-ph]Journal articles %X We report on the development of a beam line for mass-selected metal and semiconductor clusters. The cluster source combines the principles of plasma sputtering and gas condensation. Both techniques together allow to produce clusters in a wide size range. With the aid of a time-of-flight system, small clusters (i.e., Cun+, n<100) are selected and pure beams containing only one cluster size are provided. For large clusters (containing several thousands of atoms), a beam with a narrow size distribution is obtained. A 90° quadrupole deviator is used to separate charged clusters from neutral ones. %G English %L cea-00374093 %U https://cea.hal.science/cea-00374093 %~ CEA %~ CNRS %~ INSA-ROUEN %~ COMUE-NORMANDIE %~ IRAMIS-CIMAP %~ UNIROUEN %~ ENSICAEN %~ UNICAEN %~ INSA-GROUPE %~ CIMAP %~ IRAMIS