@article{wojtowicz:cea-00344156, TITLE = {{Structure and role of ultrathin AlN layers for improving optical activation of rare earth implanted GaN}}, AUTHOR = {Wojtowicz, T. and Gloux, Florence and Ruterana, Pierre and Nouet, G{\'e}rard and Bodiou, Loic and Braud, Alain and Lorenz, K. and Alves, E.}, URL = {https://cea.hal.science/cea-00344156}, JOURNAL = {{physica status solidi (b)}}, PUBLISHER = {{Wiley}}, VOLUME = {243}, PAGES = {1541-1544}, YEAR = {2006}, HAL_ID = {cea-00344156}, HAL_VERSION = {v1}, }