SILICON ON NOTHING MEMS ELECTROMECHANICAL RESONATOR - CEA - Commissariat à l’énergie atomique et aux énergies alternatives Access content directly
Conference Papers Year : 2007


Fabrice Casset
  • Function : Author
  • PersonId : 853656
Pascal Ancey
  • Function : Author
  • PersonId : 844556
Fabienne Judong
  • Function : Author
  • PersonId : 853664
Alexandre Talbot
  • Function : Author
  • PersonId : 853665
Rémi Quenouillère
  • Function : Author
  • PersonId : 853666
Denis Renaud
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  • PersonId : 853659
Stéphan Borel
  • Function : Author
  • PersonId : 853667
Brigitte Florin
  • Function : Author
  • PersonId : 853668


The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS electromechanical resonators which show interesting performances to replace SAW filters or quartz reference oscillators, allowing smaller integrated functions with lower power consumption. The resonant frequency depends on the material properties, such as Young's modulus and density, and on the movable mechanical structure dimensions (beam length defined by photolithography). Thus, it is possible to obtain multi frequencies resonators on a wafer. The resonator performance (frequency, quality factor) strongly depends on the environment, like moisture or pressure, which imply the need for a vacuum package. This paper will present first resonator mechanisms and mechanical behaviors followed by state of the art descriptions with applications and specifications overview. Then MEMS resonator developments at STMicroelectronics including FEM analysis, technological developments and characterization are detailed.
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cea-00320845 , version 1 (20-09-2008)


  • HAL Id : cea-00320845 , version 1


Cédric Durand, Fabrice Casset, Pascal Ancey, Fabienne Judong, Alexandre Talbot, et al.. SILICON ON NOTHING MEMS ELECTROMECHANICAL RESONATOR. Design Test Integration Packaging DTIP, Apr 2007, Stresa, Italy. ⟨cea-00320845⟩
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