@inproceedings{ceccotti:cea-00179829, TITLE = {{EUV Lithography development in Europe: present status and perspectives}}, AUTHOR = {Ceccotti, T.}, URL = {https://cea.hal.science/cea-00179829}, BOOKTITLE = {{Optical Science and Technology}}, ADDRESS = {San Diego, United States}, HAL_LOCAL_REFERENCE = {DRECAM\_1446; PubliCEA 200500004437}, YEAR = {2003}, MONTH = Aug, KEYWORDS = {lithography}, HAL_ID = {cea-00179829}, HAL_VERSION = {v1}, }