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Nanostructures d’oxyde d’indium pour les mémoires résistives RRAM intégrées en CMOS Back-End-Of-Line
Pierre-Vincent Guenery
Theses
tel-02936361v1
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Impact of roughness of TiN bottom electrode on the forming voltage of HfO$_2$ based resistive memories
Christelle Charpin-Nicolle
,
M. Bonvalot
,
R. Sommer
,
A. Persico
,
M.L. Cordeau
,
et al.
Journal articles
cea-02862363v1
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Engineering Self-Assembly of a High-χ Block Copolymer for Large-Area Fabrication of Transistors Based on Functional Graphene Nanoribbon Arrays
Javier Arias-Zapata
,
Jérôme Daniel Garnier
,
Hasan-Al Mehedi
,
Antoine Legrain
,
Bassem Salem
,
et al.
Journal articles
hal-02324983v1
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Development of Atomic Layer Etching (ALEt) for GaN-based materials
Congying You
,
C. Mannequin
,
G. Jacopin
,
T. Chevolleau
,
C. Durand
,
et al.
International Workshop on Nitride Semiconductors, Nov 2018, Kanazawa, Japan
Conference poster
hal-02008012v1
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Sub-10 nm plasma nanopatterning of InGaAs with nearly vertical and smooth sidewalls for advanced n-fin field effect transistors on silicon
Fares Chouchane
,
Bassem Salem
,
Guillaume Gay
,
Mickaël Martin
,
Erwine Pargon
,
et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2017, 35 (2), ⟨10.1116/1.4975796⟩
Journal articles
hal-01891230v1
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Indium oxide nanoparticles for Resistive RAM integration using a compatible industrial technology
P.V. Guenery
,
E.A. León Pérez
,
K. Ayadi
,
N. Baboux
,
D. Deleruyelle
,
et al.
Journal articles
hal-03116248v1
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Epitaxie en phase vapeur aux organométalliques et caractérisation de semi-conducteur III-As sur substrat silicium dans une plateforme microélectronique
Romain Cipro
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2016. Français. ⟨NNT : 2016GREAT049⟩
Theses
tel-01390505v1
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Coupling powder bed additive manufacturing and vapor phase deposition methods for elaboration of coated 3D Ti-6Al-4V architectures with enhanced surface properties
A. Moll
,
J.-J. Blandin
,
R. Dendievel
,
E. Gicquel
,
M. Pons
,
et al.
Journal articles
hal-03262005v1
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Low damage patterning of In 0.53 Ga 0.47 As film for its integration as n-channel in a fin metal oxide semiconductor field effect transistor architecture
Maxime Bizouerne
,
Erwine Pargon
,
Camille Petit-Etienne
,
Sébastien Labau
,
Sylvain David
,
et al.
Journal articles
hal-02145945v1
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Morphology Transition of ZnO from Thin Film to Nanowires on Silicon and its Correlated Enhanced Zinc Polarity Uniformity and Piezoelectric Responses
Quang Chieu Bui
,
Gustavo Ardila
,
Eirini Sarigiannidou
,
Hervé Roussel
,
Carmen Jiménez
,
et al.
Journal articles
hal-02917568v1
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Strongly Directional Scattering from Dielectric Nanowires
Peter Wiecha
,
Aurelien Cuche
,
Arnaud Arbouet
,
Christian Girard
,
Gérard Colas Des Francs
,
et al.
Journal articles
hal-01730478v1
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Thermally activated inter-dots carriers' transfer in InAs QDs with InGaAs underlying layer: Origin and dependence on the post-growth intermixing
Bouraoui Ilahi
,
Olfa Nasr
,
Bernard Paquette
,
H. Hadj Alouane
,
Nicolas Chauvin
,
et al.
Journal articles
hal-01918155v1
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Investigation of hybrid CBRAM/OXRAM non-volatile memories for low consumption and high reliability
Cécile Nail
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes, 2018. English. ⟨NNT : 2018GREAT010⟩
Theses
tel-01862319v1
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SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering
Viktoriia Gorbenko
,
Franck Bassani
,
Alexandre Merkulov
,
Thierry Baron
,
Mickaël Martin
,
et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2016, 34 (3), pp.03H131. ⟨10.1116/1.4944632⟩
Journal articles
hal-01881953v1
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Etude à l'échelle nanométrique par sonde locale de la fiabilité et de la dégradation de films minces d'oxyde pour applications MOS et MIM
Romain Foissac
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2015. Français. ⟨NNT : 2015GREAT047⟩
Theses
tel-01218188v1
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Effet de recuits thermiques sur des diélectriques à faible permittivité pour des applications Back-End-of-Line intermédiaire en vue d'une intégration 3D séquentielle
Sylvain Beaurepaire
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2019. Français. ⟨NNT : 2019GREAT085⟩
Theses
tel-02634361v1
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Improvement of AlN Film Quality Using Plasma Enhanced Atomic Layer Deposition with Substrate Biasing
Maxime Legallais
,
Hussein Mehdi
,
Sylvain David
,
Franck Bassani
,
Sébastien Labau
,
et al.
Journal articles
hal-03030507v1
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Direct epitaxy of III-V semiconductors on silicon substrate for photonic devices.
Marie-Léonor Touraton
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes [2020-..], 2020. English. ⟨NNT : 2020GRALT010⟩
Theses
tel-02976001v1
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High capacitance density of 185 nF/mm2 achieved in three-dimensional MIM structures using TiO2 as a dielectric
A. Chaker
,
P. Gonon
,
Corentin Vallée
,
A. Bsiesy
Journal articles
hal-01825047v1
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Reversible Al Propagation in Si x Ge 1-x Nanowires: Implications for Electrical Contact Formation
Minh Anh Luong
,
Eric Robin
,
Nicolas Pauc
,
Pascal Gentile
,
Thierry Baron
,
et al.
Journal articles
hal-02465092v1
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Origin of second-harmonic generation from individual silicon nanowires
Peter Wiecha
,
Arnaud Arbouet
,
Christian Girard
,
Thierry Baron
,
Vincent Paillard
Journal articles
hal-01763385v1
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Super-réseaux GeTe/Sb2Te3 pour les mémoires iPCM : croissance PVD par épitaxie van der Waals et étude de leur structure
Philippe Kowalczyk
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2018. Français. ⟨NNT : 2018GREAT109⟩
Theses
tel-02143111v1
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Fabrication and characterization of a germanium nanowire light emitting diode
Johannes Greil
,
Emmerich Bertagnolli
,
Bassem Salem
,
Thierry Baron
,
Pascal Gentile
,
et al.
Journal articles
cea-01988258v1
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Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO 2 Using Trivinylmethoxysilane and Oxygen Plasma
Viet Huong Nguyen
,
Abderrahime Sekkat
,
César Arturo Masse de La Huerta
,
Fadi Zoubian
,
Chiara Crivello
,
et al.
Journal articles
hal-02917572v1
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Toward a Reliable Chipless RFID Humidity Sensor Tag Based on Silicon Nanowires
Arnaud Vena
,
Etienne Perret
,
Darine Kaddour
,
Thierry Baron
Journal articles
hal-01753221v1
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Role played by the nanowire/nanowire junctions in the electrical properties of semiconductor percolating silicon nanowire networks
Maxime Legallais
,
Thi Thu Thuy Nguyen
,
Thibauld Cazimajou
,
Mireille Mouis
,
Tabassom Arjmand
,
et al.
Journal articles
hal-03024377v1
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Dépôts sélectifs d'oxydes de Titane et de Tantale par ajout d'un plasma de gravure dans un procédé PEALD pour application aux mémoires résistives
Rémi Vallat
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2018. Français. ⟨NNT : 2018GREAT073⟩
Theses
tel-02015570v1
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Study of materials interactions and electrochemical mechanisms at the interfaces of electrodes of a memory stack based on metal oxides
Aurélie Marty
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes, 2018. English. ⟨NNT : 2018GREAT038⟩
Theses
tel-01891068v1
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Ion beam characterisation of III-V heterostructures for micro and optoelectronic applications
Viktoriia Gorbenko
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes, 2015. English. ⟨NNT : 2015GREAT140⟩
Theses
tel-01281330v1
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Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
Rémi Vallat
,
Rémy Gassilloud
,
Brice Eychenne
,
Christophe Vallée
Journal articles
hal-01891189v1
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