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Nanostructures d’oxyde d’indium pour les mémoires résistives RRAM intégrées en CMOS Back-End-Of-Line

Pierre-Vincent Guenery
Electronique. Université de Lyon, 2019. Français. ⟨NNT : 2019LYSEI114⟩
Theses tel-02936361v1
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Impact of roughness of TiN bottom electrode on the forming voltage of HfO$_2$ based resistive memories

Christelle Charpin-Nicolle , M. Bonvalot , R. Sommer , A. Persico , M.L. Cordeau , et al.
Microelectronic Engineering, 2020, 221, pp.111194. ⟨10.1016/j.mee.2019.111194⟩
Journal articles cea-02862363v1
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Engineering Self-Assembly of a High-χ Block Copolymer for Large-Area Fabrication of Transistors Based on Functional Graphene Nanoribbon Arrays

Javier Arias-Zapata , Jérôme Daniel Garnier , Hasan-Al Mehedi , Antoine Legrain , Bassem Salem , et al.
Chemistry of Materials, 2019, 31 (9), pp.3154-3162. ⟨10.1021/acs.chemmater.8b04936⟩
Journal articles hal-02324983v1
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Development of Atomic Layer Etching (ALEt) for GaN-based materials

Congying You , C. Mannequin , G. Jacopin , T. Chevolleau , C. Durand , et al.
International Workshop on Nitride Semiconductors, Nov 2018, Kanazawa, Japan
Conference poster hal-02008012v1
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Sub-10 nm plasma nanopatterning of InGaAs with nearly vertical and smooth sidewalls for advanced n-fin field effect transistors on silicon

Fares Chouchane , Bassem Salem , Guillaume Gay , Mickaël Martin , Erwine Pargon , et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2017, 35 (2), ⟨10.1116/1.4975796⟩
Journal articles hal-01891230v1
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Indium oxide nanoparticles for Resistive RAM integration using a compatible industrial technology

P.V. Guenery , E.A. León Pérez , K. Ayadi , N. Baboux , D. Deleruyelle , et al.
Solid-State Electronics, 2021, pp.107958. ⟨10.1016/j.sse.2021.107958⟩
Journal articles hal-03116248v1
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Epitaxie en phase vapeur aux organométalliques et caractérisation de semi-conducteur III-As sur substrat silicium dans une plateforme microélectronique

Romain Cipro
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2016. Français. ⟨NNT : 2016GREAT049⟩
Theses tel-01390505v1
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Coupling powder bed additive manufacturing and vapor phase deposition methods for elaboration of coated 3D Ti-6Al-4V architectures with enhanced surface properties

A. Moll , J.-J. Blandin , R. Dendievel , E. Gicquel , M. Pons , et al.
Surface and Coatings Technology, 2021, 415, pp.127130. ⟨10.1016/j.surfcoat.2021.127130⟩
Journal articles hal-03262005v1
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Low damage patterning of In 0.53 Ga 0.47 As film for its integration as n-channel in a fin metal oxide semiconductor field effect transistor architecture

Maxime Bizouerne , Erwine Pargon , Camille Petit-Etienne , Sébastien Labau , Sylvain David , et al.
Journal of Vacuum Science & Technology A, 2018, 36 (6), pp.061305. ⟨10.1116/1.5051505⟩
Journal articles hal-02145945v1
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Morphology Transition of ZnO from Thin Film to Nanowires on Silicon and its Correlated Enhanced Zinc Polarity Uniformity and Piezoelectric Responses

Quang Chieu Bui , Gustavo Ardila , Eirini Sarigiannidou , Hervé Roussel , Carmen Jiménez , et al.
ACS Applied Materials & Interfaces, 2020, 12 (26), pp.29583-29593. ⟨10.1021/acsami.0c04112⟩
Journal articles hal-02917568v1
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Strongly Directional Scattering from Dielectric Nanowires

Peter Wiecha , Aurelien Cuche , Arnaud Arbouet , Christian Girard , Gérard Colas Des Francs , et al.
ACS photonics, 2017, 4 (8), pp.2036 - 2046. ⟨10.1021/acsphotonics.7b00423⟩
Journal articles hal-01730478v1
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Thermally activated inter-dots carriers' transfer in InAs QDs with InGaAs underlying layer: Origin and dependence on the post-growth intermixing

Bouraoui Ilahi , Olfa Nasr , Bernard Paquette , H. Hadj Alouane , Nicolas Chauvin , et al.
Journal of Alloys and Compounds, 2016, 656, pp.132-137. ⟨10.1016/j.jallcom.2015.09.231⟩
Journal articles hal-01918155v1
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Investigation of hybrid CBRAM/OXRAM non-volatile memories for low consumption and high reliability

Cécile Nail
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes, 2018. English. ⟨NNT : 2018GREAT010⟩
Theses tel-01862319v1
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SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering

Viktoriia Gorbenko , Franck Bassani , Alexandre Merkulov , Thierry Baron , Mickaël Martin , et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2016, 34 (3), pp.03H131. ⟨10.1116/1.4944632⟩
Journal articles hal-01881953v1
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Etude à l'échelle nanométrique par sonde locale de la fiabilité et de la dégradation de films minces d'oxyde pour applications MOS et MIM

Romain Foissac
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2015. Français. ⟨NNT : 2015GREAT047⟩
Theses tel-01218188v1
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Effet de recuits thermiques sur des diélectriques à faible permittivité pour des applications Back-End-of-Line intermédiaire en vue d'une intégration 3D séquentielle

Sylvain Beaurepaire
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2019. Français. ⟨NNT : 2019GREAT085⟩
Theses tel-02634361v1
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Improvement of AlN Film Quality Using Plasma Enhanced Atomic Layer Deposition with Substrate Biasing

Maxime Legallais , Hussein Mehdi , Sylvain David , Franck Bassani , Sébastien Labau , et al.
ACS Applied Materials & Interfaces, 2020, 12 (35), pp.39870-39880. ⟨10.1021/acsami.0c10515⟩
Journal articles hal-03030507v1
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Direct epitaxy of III-V semiconductors on silicon substrate for photonic devices.

Marie-Léonor Touraton
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes [2020-..], 2020. English. ⟨NNT : 2020GRALT010⟩
Theses tel-02976001v1
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High capacitance density of 185 nF/mm2 achieved in three-dimensional MIM structures using TiO2 as a dielectric

A. Chaker , P. Gonon , Corentin Vallée , A. Bsiesy
Applied Physics Letters, 2017, 110, pp.243501. ⟨10.1063/1.4986196⟩
Journal articles hal-01825047v1
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Reversible Al Propagation in Si x Ge 1-x Nanowires: Implications for Electrical Contact Formation

Minh Anh Luong , Eric Robin , Nicolas Pauc , Pascal Gentile , Thierry Baron , et al.
ACS Applied Nano Materials, 2020, 3 (10), pp.10427-10436. ⟨10.1021/acsanm.0c02303⟩
Journal articles hal-02465092v1
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Origin of second-harmonic generation from individual silicon nanowires

Peter Wiecha , Arnaud Arbouet , Christian Girard , Thierry Baron , Vincent Paillard
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2016, 93 (12), pp.125421. ⟨10.1103/PhysRevB.93.125421⟩
Journal articles hal-01763385v1
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Super-réseaux GeTe/Sb2Te3 pour les mémoires iPCM : croissance PVD par épitaxie van der Waals et étude de leur structure

Philippe Kowalczyk
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2018. Français. ⟨NNT : 2018GREAT109⟩
Theses tel-02143111v1
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Fabrication and characterization of a germanium nanowire light emitting diode

Johannes Greil , Emmerich Bertagnolli , Bassem Salem , Thierry Baron , Pascal Gentile , et al.
Applied Physics Letters, 2017, 111 (23), pp.233103. ⟨10.1063/1.5006152⟩
Journal articles cea-01988258v1
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Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO 2 Using Trivinylmethoxysilane and Oxygen Plasma

Viet Huong Nguyen , Abderrahime Sekkat , César Arturo Masse de La Huerta , Fadi Zoubian , Chiara Crivello , et al.
Chemistry of Materials, 2020, 32 (12), pp.5153-5161. ⟨10.1021/acs.chemmater.0c01148⟩
Journal articles hal-02917572v1
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Toward a Reliable Chipless RFID Humidity Sensor Tag Based on Silicon Nanowires

Arnaud Vena , Etienne Perret , Darine Kaddour , Thierry Baron
IEEE Transactions on Microwave Theory and Techniques, 2016, 64 (9), pp.2977 - 2985. ⟨10.1109/tmtt.2016.2594229⟩
Journal articles hal-01753221v1
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Role played by the nanowire/nanowire junctions in the electrical properties of semiconductor percolating silicon nanowire networks

Maxime Legallais , Thi Thu Thuy Nguyen , Thibauld Cazimajou , Mireille Mouis , Tabassom Arjmand , et al.
Journal of Applied Physics, 2020, 128 (20), pp.204501. ⟨10.1063/5.0023322⟩
Journal articles hal-03024377v1
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Dépôts sélectifs d'oxydes de Titane et de Tantale par ajout d'un plasma de gravure dans un procédé PEALD pour application aux mémoires résistives

Rémi Vallat
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2018. Français. ⟨NNT : 2018GREAT073⟩
Theses tel-02015570v1
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Study of materials interactions and electrochemical mechanisms at the interfaces of electrodes of a memory stack based on metal oxides

Aurélie Marty
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes, 2018. English. ⟨NNT : 2018GREAT038⟩
Theses tel-01891068v1
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Ion beam characterisation of III-V heterostructures for micro and optoelectronic applications

Viktoriia Gorbenko
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes, 2015. English. ⟨NNT : 2015GREAT140⟩
Theses tel-01281330v1
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Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Rémi Vallat , Rémy Gassilloud , Brice Eychenne , Christophe Vallée
Journal of Vacuum Science & Technology A, 2017, 35 (1), pp.01B104. ⟨10.1116/1.4965966⟩
Journal articles hal-01891189v1