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Deposit type : Notice

Change in admittance of HfO2 Metal-Insulator-Metal (MIM) Capacitors after dc Bias Stress

O. Khaldi , P. Gonon , C. Mannequin , Corentin Vallée , F. Jomni , et al.
ECS Solid State Letters, 2013, 2 (5), pp.N1-N3
Journal articles hal-00908475v1

Evaluation of plasma parameters on PEALD deposited TaCN

Fabien Piallat , Virginie Beugin , Remy Gassilloud , Philippe Michallon , Laurent Dussault , et al.
Microelectronic Engineering, 2013, 107, pp.156-160. ⟨10.1016/j.mee.2012.08.020⟩
Journal articles hal-00908477v1

Electrical characterisation of Si nanowires by scanning probe microscopy

M. Kogelschatz , A. Potié , H. Abed , F. Dhalluin , B. Salem , et al.
GdR Nanofils et Nanotubes Semiconducteurs, 2009, Autrans, France
Conference papers hal-00461109v1

Elaboration and integration of auto-organized nanostructures for nanoelectronics applications Make toward nanowires transistor

B. Salhi , C. Agraffeil , T. Baron , M. Kogelschatz , G. Cunge , et al.
GdR Nanofils et Nanotubes Semiconducteurs – Workshop 2009, 2009, Autrans, France
Conference papers hal-00461118v1

Current fluctuations in Au/HfO2/PT resistive switching memories

Corentin Vallée , P. Gonon , Corentin Jorel , V. Jousseaume
56h National Symposium AVS (2009), 2009, San Jose, United States
Conference papers hal-00461096v1

Photoluminescence of silicon nanowires obtained by epitaxial chemical vapor deposition

O. Demichel , F. Oehler , V. Calvo , P. Noe , N. Pauc , et al.
Physica E: Low-dimensional Systems and Nanostructures, 2009, pp.41 (6): 963-965 MAY 8 2009
Journal articles hal-00455408v1

New capacitor parametric test methodology for process issues control

Jean-Philippe Manceau , Aurélie Bajolet , S. Cremer , M. Quoirin , S. Bruyère , et al.
ESSDERC, European Solid-stade Device Research Conference, Sep 2007, Munich, Germany
Conference papers hal-00289072v1

Growth and Characterization of Si and Ge Nanodots and Nanowires for Electronics and Photonics Applications

T. Baron , P. Ferret , P. Gentile , M. Gordon
ECS 207th Meeting, 2005, Quebec City, Canada
Conference papers hal-00395841v1

Photonics at nanometer scale: tracking light in high Q low V nanocavities

Philippe Velha , B. Cluzel , L. Lalouat , E. Picard , D. Peyrade , et al.
TNT Trends in Nanotechnology, 2006, grenoble, France
Conference papers hal-00395895v1

Effect of nitrogen addition on the properties of C:F thin films deposited by RF sputtering

P. Gonon
European Physical Journal: Applied Physics, 2005, pp.32, 15
Journal articles hal-00394679v1

Amorphous barium titanate films deposited by RF magnetron sputtering: influence of the oxygen/argon mixing ratio on the electrical properties

F. El Kamel , P. Gonon
Proc.Electroceramics X, 2006, tolede, Spain
Conference papers hal-00394704v1

Dielectric properties of an epoxy/silver nanocomposite for embedded capacitors

A. Boudefel , P. Gonon , M. Nemamcha
Proc.15th European Microelectronics and Packaging Conference (EMPC 2005), 2005, bruges, Belgium
Conference papers hal-00394710v1

Statistics of electrical breakdown field in HfO2 and SiO2 films from millimeter to nanometer length scales

C. Sire , S. Blonkowski , M. Gordon , T. Baron
Applied Physics Letters, 2007, pp.91 242905
Journal articles hal-00394766v1

Fabrication of Well-Organized and Densely Packed Si Nanopillars Containing SiGe Nanodots by Using Block Copolymer Templates

K. Aissou , T. Baron , M. Kogelschatz , M. den Hertog , J.L. Rouviere , et al.
Chemistry of Materials, 2008, pp.20 6183-6188
Journal articles hal-00394788v1

Self-connected horizontal silicon nanowire field effect transistor

B. Salem , F. Dhalluin , H. Abed , T. Baron , P. Gentile , et al.
Solid State Communications, 2009, pp.149, 799 (2009)
Journal articles hal-00394801v1

Elaboration et organisation de nano-objets à l'aide de copolymères diblocs

T. Baron , K. Aissou , M. Kogelschatz
GDR SESAME, 2005, grenoble, France
Conference papers hal-00394826v1

Study of diblock copolymer thin film organization for nanostructures elaboration

K. Aissou , T. Baron , M. Kogelschatz , A. Pascale , M. Gordon
E-MRS, 2007, strasbourg, France
Conference papers hal-00395909v1

Investigation of electronic states of silicon nanowires grown by vapor-liquid-solid method

O. Demichel , P. Noe , P. Gentile , V. Calvo , T. Baron , et al.
E-MRS, 2007, strasbourg, France
Conference papers hal-00395913v1

VLS-CVD growth and electrical characterization of individual silicon nanowires

B. Salem , F. . Dhalluin , T. Baron , P. Gentile , N. Pauc , et al.
397 WE-Heraeus-Seminar, 2007, bonne, Germany
Conference papers hal-00396819v1

Controlled growth of Branched Silicon Nanowires using trimethylaluminium and silane as CVD gas precursors

F. Oehler , P. Gentile , T. Baron , B. Salem , M. den Hertog , et al.
MRS Boston (2008), 2008, BOSTON, United States
Conference papers hal-00396837v1

Influence of CVD growth mode on silicon nanowires : effects of reactive HCl, temperatureand SiH4 partial pressure

F. Oehler , P. Gentile , T. Baron , B. Salem , M. den Hertog , et al.
MRS Boston (2008), 2008, BOSTON, United States
Conference papers hal-00396838v1

Improved electrical properties using high work function electrode material for MIM capacitor applications

E. Gourvest , Myrtil L. Kahn , C. Vallee , P. Gonon , Corentin Jorel , et al.
Proc.eedings of the 15th Workshop on Dielectrics in Microelectronics, WODIM 2008, 2008, Germany
Conference papers hal-00397019v1

Fabrication and electrical characterization of nanopillars containing silicon nanocrystals

L. Eugene , N. Pauc , T. Baron , A. Souifi , V. Aimez , et al.
CSTC, 2007, montreal, Canada
Conference papers hal-00396812v1

SiC-based 1D Nanostructures for Bio-nano-technologies

Laurence Latu-Romain , Maelig Ollivier , Mickael Martin , Arnaud Mantoux , Edwige Bano , et al.
MRS, Materials Research Society, Apr 2013, San Francisco, United States
Conference papers hal-00950047v1

Effect of HCl on the Doping and Shape Control of Silicon Nanowires

P. Gentile , N. Pauc , F. Oehler , V. Calvo , A. Solanki , et al.
MRS Spring meeting, Apr 2011, San Francisco, United States
Conference papers hal-00650234v1

Fabrication of SiC nanopillars by inductively coupled SF6/O2 plasma

J.H. Choi , L. Latu-Romain , F. Dhalluin , T. Chevolleau , B. Salem , et al.
HeteroSiC, Jun 2011, Tours, France
Conference papers hal-00650057v1

On the role of oxygen vacancy defects in voltage nonlinearities observed in high k metal-insulator-metal (MIM) capacitors

Corentin Vallée , P. Gonon , F. El Kamel
Materials for Advanced Technologies (ICMAT), Jun 2011, Singapore
Conference papers hal-00650164v1

PECVD of GeTe for next generation of non-volatile memories

Corentin Vallée , L. Dussault , E. Despiau , E. Gourvest , D. Jourde , et al.
CIP 2011 - 18th International Colloquium on Plasma Processes, Jul 2011, Nantes, France
Conference papers hal-00650171v1

ALD/PEALD CMOS Compatible Oxide for Resistive RAM

A. Salaün , V. Beugin , H. Grampeix , C. Licitra , N. Rochat , et al.
58th National Symposium AVS, Oct 2011, Nashville, United States
Conference papers hal-00650184v1

Control of 10 nm scale cylinder orientation in self-organized sugar-based block copolymer thin films

Issei Otsuka , Salomé Tallegas , Yoko Sakai , Cyrille Rochas , Sami Halila , et al.
Nanoscale, 2013, 5 (7), pp.2637-2641. ⟨10.1039/c3nr00332a⟩
Journal articles hal-02114580v1