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Change in admittance of HfO2 Metal-Insulator-Metal (MIM) Capacitors after dc Bias Stress
O. Khaldi
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P. Gonon
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C. Mannequin
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Corentin Vallée
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F. Jomni
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et al.
ECS Solid State Letters, 2013, 2 (5), pp.N1-N3
Journal articles
hal-00908475v1
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Evaluation of plasma parameters on PEALD deposited TaCN
Fabien Piallat
,
Virginie Beugin
,
Remy Gassilloud
,
Philippe Michallon
,
Laurent Dussault
,
et al.
Journal articles
hal-00908477v1
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Electrical characterisation of Si nanowires by scanning probe microscopy
M. Kogelschatz
,
A. Potié
,
H. Abed
,
F. Dhalluin
,
B. Salem
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et al.
GdR Nanofils et Nanotubes Semiconducteurs, 2009, Autrans, France
Conference papers
hal-00461109v1
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Elaboration and integration of auto-organized nanostructures for nanoelectronics applications Make toward nanowires transistor
B. Salhi
,
C. Agraffeil
,
T. Baron
,
M. Kogelschatz
,
G. Cunge
,
et al.
GdR Nanofils et Nanotubes Semiconducteurs – Workshop 2009, 2009, Autrans, France
Conference papers
hal-00461118v1
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Current fluctuations in Au/HfO2/PT resistive switching memories
Corentin Vallée
,
P. Gonon
,
Corentin Jorel
,
V. Jousseaume
56h National Symposium AVS (2009), 2009, San Jose, United States
Conference papers
hal-00461096v1
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Photoluminescence of silicon nanowires obtained by epitaxial chemical vapor deposition
O. Demichel
,
F. Oehler
,
V. Calvo
,
P. Noe
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N. Pauc
,
et al.
Physica E: Low-dimensional Systems and Nanostructures, 2009, pp.41 (6): 963-965 MAY 8 2009
Journal articles
hal-00455408v1
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New capacitor parametric test methodology for process issues control
Jean-Philippe Manceau
,
Aurélie Bajolet
,
S. Cremer
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M. Quoirin
,
S. Bruyère
,
et al.
ESSDERC, European Solid-stade Device Research Conference, Sep 2007, Munich, Germany
Conference papers
hal-00289072v1
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Growth and Characterization of Si and Ge Nanodots and Nanowires for Electronics and Photonics Applications
T. Baron
,
P. Ferret
,
P. Gentile
,
M. Gordon
ECS 207th Meeting, 2005, Quebec City, Canada
Conference papers
hal-00395841v1
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Photonics at nanometer scale: tracking light in high Q low V nanocavities
Philippe Velha
,
B. Cluzel
,
L. Lalouat
,
E. Picard
,
D. Peyrade
,
et al.
TNT Trends in Nanotechnology, 2006, grenoble, France
Conference papers
hal-00395895v1
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Effect of nitrogen addition on the properties of C:F thin films deposited by RF sputtering
P. Gonon
European Physical Journal: Applied Physics, 2005, pp.32, 15
Journal articles
hal-00394679v1
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Amorphous barium titanate films deposited by RF magnetron sputtering: influence of the oxygen/argon mixing ratio on the electrical properties
F. El Kamel
,
P. Gonon
Proc.Electroceramics X, 2006, tolede, Spain
Conference papers
hal-00394704v1
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Dielectric properties of an epoxy/silver nanocomposite for embedded capacitors
A. Boudefel
,
P. Gonon
,
M. Nemamcha
Proc.15th European Microelectronics and Packaging Conference (EMPC 2005), 2005, bruges, Belgium
Conference papers
hal-00394710v1
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Statistics of electrical breakdown field in HfO2 and SiO2 films from millimeter to nanometer length scales
C. Sire
,
S. Blonkowski
,
M. Gordon
,
T. Baron
Applied Physics Letters, 2007, pp.91 242905
Journal articles
hal-00394766v1
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Fabrication of Well-Organized and Densely Packed Si Nanopillars Containing SiGe Nanodots by Using Block Copolymer Templates
K. Aissou
,
T. Baron
,
M. Kogelschatz
,
M. den Hertog
,
J.L. Rouviere
,
et al.
Chemistry of Materials, 2008, pp.20 6183-6188
Journal articles
hal-00394788v1
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Self-connected horizontal silicon nanowire field effect transistor
B. Salem
,
F. Dhalluin
,
H. Abed
,
T. Baron
,
P. Gentile
,
et al.
Solid State Communications, 2009, pp.149, 799 (2009)
Journal articles
hal-00394801v1
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Elaboration et organisation de nano-objets à l'aide de copolymères diblocs
T. Baron
,
K. Aissou
,
M. Kogelschatz
GDR SESAME, 2005, grenoble, France
Conference papers
hal-00394826v1
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Study of diblock copolymer thin film organization for nanostructures elaboration
K. Aissou
,
T. Baron
,
M. Kogelschatz
,
A. Pascale
,
M. Gordon
E-MRS, 2007, strasbourg, France
Conference papers
hal-00395909v1
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Investigation of electronic states of silicon nanowires grown by vapor-liquid-solid method
O. Demichel
,
P. Noe
,
P. Gentile
,
V. Calvo
,
T. Baron
,
et al.
E-MRS, 2007, strasbourg, France
Conference papers
hal-00395913v1
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VLS-CVD growth and electrical characterization of individual silicon nanowires
B. Salem
,
F. . Dhalluin
,
T. Baron
,
P. Gentile
,
N. Pauc
,
et al.
397 WE-Heraeus-Seminar, 2007, bonne, Germany
Conference papers
hal-00396819v1
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Controlled growth of Branched Silicon Nanowires using trimethylaluminium and silane as CVD gas precursors
F. Oehler
,
P. Gentile
,
T. Baron
,
B. Salem
,
M. den Hertog
,
et al.
MRS Boston (2008), 2008, BOSTON, United States
Conference papers
hal-00396837v1
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Influence of CVD growth mode on silicon nanowires : effects of reactive HCl, temperatureand SiH4 partial pressure
F. Oehler
,
P. Gentile
,
T. Baron
,
B. Salem
,
M. den Hertog
,
et al.
MRS Boston (2008), 2008, BOSTON, United States
Conference papers
hal-00396838v1
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Improved electrical properties using high work function electrode material for MIM capacitor applications
E. Gourvest
,
Myrtil L. Kahn
,
C. Vallee
,
P. Gonon
,
Corentin Jorel
,
et al.
Proc.eedings of the 15th Workshop on Dielectrics in Microelectronics, WODIM 2008, 2008, Germany
Conference papers
hal-00397019v1
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Fabrication and electrical characterization of nanopillars containing silicon nanocrystals
L. Eugene
,
N. Pauc
,
T. Baron
,
A. Souifi
,
V. Aimez
,
et al.
CSTC, 2007, montreal, Canada
Conference papers
hal-00396812v1
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SiC-based 1D Nanostructures for Bio-nano-technologies
Laurence Latu-Romain
,
Maelig Ollivier
,
Mickael Martin
,
Arnaud Mantoux
,
Edwige Bano
,
et al.
MRS, Materials Research Society, Apr 2013, San Francisco, United States
Conference papers
hal-00950047v1
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Effect of HCl on the Doping and Shape Control of Silicon Nanowires
P. Gentile
,
N. Pauc
,
F. Oehler
,
V. Calvo
,
A. Solanki
,
et al.
MRS Spring meeting, Apr 2011, San Francisco, United States
Conference papers
hal-00650234v1
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Fabrication of SiC nanopillars by inductively coupled SF6/O2 plasma
J.H. Choi
,
L. Latu-Romain
,
F. Dhalluin
,
T. Chevolleau
,
B. Salem
,
et al.
HeteroSiC, Jun 2011, Tours, France
Conference papers
hal-00650057v1
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On the role of oxygen vacancy defects in voltage nonlinearities observed in high k metal-insulator-metal (MIM) capacitors
Corentin Vallée
,
P. Gonon
,
F. El Kamel
Materials for Advanced Technologies (ICMAT), Jun 2011, Singapore
Conference papers
hal-00650164v1
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PECVD of GeTe for next generation of non-volatile memories
Corentin Vallée
,
L. Dussault
,
E. Despiau
,
E. Gourvest
,
D. Jourde
,
et al.
CIP 2011 - 18th International Colloquium on Plasma Processes, Jul 2011, Nantes, France
Conference papers
hal-00650171v1
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ALD/PEALD CMOS Compatible Oxide for Resistive RAM
A. Salaün
,
V. Beugin
,
H. Grampeix
,
C. Licitra
,
N. Rochat
,
et al.
58th National Symposium AVS, Oct 2011, Nashville, United States
Conference papers
hal-00650184v1
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Control of 10 nm scale cylinder orientation in self-organized sugar-based block copolymer thin films
Issei Otsuka
,
Salomé Tallegas
,
Yoko Sakai
,
Cyrille Rochas
,
Sami Halila
,
et al.
Journal articles
hal-02114580v1
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