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Study of thin hafnium oxides deposited by atomic layer deposition
J.J. Ganem
,
I. Trimaille
,
Ian Vickridge
,
D. Blin
,
F. Martin
Conference papers
istex
hal-00005053v1
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Thermal oxidation of 6H-SiC studied by oxygen isotopic tracing and narrow nuclear resonance profiling
I. Trimaille
,
J.J. Ganem
,
Ian Vickridge
,
S. Rigo
,
G. Battistig
,
et al.
Conference papers
istex
hal-00005210v1
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Interface defects in n-type 3C-SiC/SiO2: An EPR study of oxidized porous silicon carbide single crystals
Jurgen von Bardeleben
,
Jean-Louis Cantin
,
L Ke
,
Y Shishkin
,
Rp Devaty
,
et al.
5th European Conference on Silicon Carbide and Related Materials, Aug 2004, Bologna, Unknown Region. pp.273-276
Conference papers
hal-01288832v1
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RBS-channeling and EPR studies of damage in 2 MeV Al2+-implanted 6H-SiC substrates
A Morilla
,
Jg Lopez
,
G Battistig
,
Jean-Louis Cantin
,
Jc Cheang-Wong
,
et al.
5th European Conference on Silicon Carbide and Related Materials, Aug 2004, Bologna, Unknown Region. pp.291-294
Conference papers
hal-01288836v1
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Characterization of SiC thin film obtained by magnetron reactive sputtering : IBA, IR and Raman studies
H Colder
,
M Morales
,
R Rizk
,
Ian Vickridge
5th European Conference on Silicon Carbide and Related Materials, Aug 2004, Bologna, Unknown Region. pp.287-290
Conference papers
hal-01288833v1
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Modification of the oxide/semiconductor interface by high temperature NO treatments: A combined EPR, NRA and XPS study on oxidized porous and bulk n-type 4H-SiC
Jurgen von Bardeleben
,
Jean-Louis Cantin
,
Ian Vickridge
,
Yw Song
,
S Dhar
,
et al.
5th European Conference on Silicon Carbide and Related Materials, Aug 2004, Bologna, Unknown Region. pp.277-280
Conference papers
hal-01288837v1
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Impurities and related microstructure in nanocrystalline silicon films grown by radiofrequency magnetron sputtering
C. Goncalvez
,
Martine Lejeune
,
S. Charvet
,
Andreas Zeinert
,
Annie Grosman
,
et al.
Journal articles
istex
hal-00004393v1
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