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Deposit type : Notice

Study of thin hafnium oxides deposited by atomic layer deposition

J.J. Ganem , I. Trimaille , Ian Vickridge , D. Blin , F. Martin
the Sixteenth International Conference on Ion Beam Analysis, 2004, France. pp.856-861., ⟨10.1016/j.nimb.2004.01.176⟩
Conference papers istex hal-00005053v1

Thermal oxidation of 6H-SiC studied by oxygen isotopic tracing and narrow nuclear resonance profiling

I. Trimaille , J.J. Ganem , Ian Vickridge , S. Rigo , G. Battistig , et al.
the Sixteenth International Conference on Ion Beam Analysis, 2004, France. pp.914-918., ⟨10.1016/j.nimb.2004.01.187⟩
Conference papers istex hal-00005210v1

Interface defects in n-type 3C-SiC/SiO2: An EPR study of oxidized porous silicon carbide single crystals

Jurgen von Bardeleben , Jean-Louis Cantin , L Ke , Y Shishkin , Rp Devaty , et al.
5th European Conference on Silicon Carbide and Related Materials, Aug 2004, Bologna, Unknown Region. pp.273-276
Conference papers hal-01288832v1

RBS-channeling and EPR studies of damage in 2 MeV Al2+-implanted 6H-SiC substrates

A Morilla , Jg Lopez , G Battistig , Jean-Louis Cantin , Jc Cheang-Wong , et al.
5th European Conference on Silicon Carbide and Related Materials, Aug 2004, Bologna, Unknown Region. pp.291-294
Conference papers hal-01288836v1

Characterization of SiC thin film obtained by magnetron reactive sputtering : IBA, IR and Raman studies

H Colder , M Morales , R Rizk , Ian Vickridge
5th European Conference on Silicon Carbide and Related Materials, Aug 2004, Bologna, Unknown Region. pp.287-290
Conference papers hal-01288833v1

Modification of the oxide/semiconductor interface by high temperature NO treatments: A combined EPR, NRA and XPS study on oxidized porous and bulk n-type 4H-SiC

Jurgen von Bardeleben , Jean-Louis Cantin , Ian Vickridge , Yw Song , S Dhar , et al.
5th European Conference on Silicon Carbide and Related Materials, Aug 2004, Bologna, Unknown Region. pp.277-280
Conference papers hal-01288837v1

Impurities and related microstructure in nanocrystalline silicon films grown by radiofrequency magnetron sputtering

C. Goncalvez , Martine Lejeune , S. Charvet , Andreas Zeinert , Annie Grosman , et al.
Thin Solid Films, 2004, 451-452, pp.370. ⟨10.1016/j.tsf.2003.11.015⟩
Journal articles istex hal-00004393v1